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Design, selection and use of spindle fixtures in semiconductor equipment

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I. Introduction

 

Semiconductor equipment plays an important role in modern manufacturing. These devices require precise and reliable components and assemblies to ensure high-quality semiconductor products. Spindle fixture is one of the important components in semiconductor equipment, and it plays a key role in semiconductor processing. This article will introduce the design, performance requirements, selection and use of the spindle fixture, and look forward to its future development direction.

  「GPM Share」Design, selection and use of spindle fixtures in semiconductor equipment

Image credit: Getspares


II. Design and Function of the Spindle Fixture

 

Spindle clamps are parts used to clamp workpieces in semiconductor equipment. It usually consists of a fixture body, a clamping rod, a ball and a spring. The design requirements and functions of the spindle fixture depend on its application scenario. In semiconductor processing, spindle fixtures need to meet the following requirements:

 

High clamping force: Semiconductor processing requires high-precision and high-quality workpieces, so the spindle fixture needs to have high clamping force to ensure that the workpiece does not shift or deform.

High rigidity: Semiconductor processing requires high-precision and high-speed motion, so the spindle fixture needs to have high rigidity to avoid vibration and deformation of the workpiece.

Temperature stability: Semiconductor processing needs to be carried out at a specific temperature, so the spindle fixture needs to have good temperature stability to avoid deformation or displacement of the workpiece due to temperature changes.

Lightweight: Spindle fixtures need to be lightweight for easy installation and operation.

Reliability: Spindle fixtures need to have high reliability to avoid downtime and cost losses in production.

The application scenarios of spindle fixtures in semiconductor equipment include: chip processing, semiconductor device manufacturing, semiconductor testing, etc.

 

III. Performance Requirements for Spindle Fixtures

 

The performance requirements of the spindle fixture involve clamping force, rigidity, temperature stability and other aspects. In semiconductor processing, the performance of the spindle fixture directly affects the processing effect and product quality.

 

Clamping force

Clamping force refers to the force required for the spindle clamp to clamp the workpiece. The clamping force needs to be adjusted according to the shape, size and processing requirements of the workpiece. Too much clamping force will cause workpiece deformation or damage, and too small clamping force will cause workpiece displacement or deformation.

 

rigidity

The rigidity of the spindle fixture refers to the degree of deformation of the fixture under the action of external force. The high-rigidity spindle fixture can maintain the accuracy and stability of the workpiece, thereby improving processing efficiency and product quality. Rigidity is mainly affected by factors such as fixture material, structural design and machining accuracy.

 

temperature stability

The temperature stability of the spindle fixture refers to the stability that the fixture can maintain the clamping force and rigidity when the working temperature changes. In semiconductor processing, the processing temperature is usually high, and the temperature stability of the fixture needs to meet certain requirements. Usually special materials, design structures and processing techniques are used to improve the temperature stability of the spindle fixture.

 

In addition to the above performance requirements, spindle fixtures also need to meet other requirements, such as light weight, easy installation and adjustment, easy cleaning and maintenance, etc. These requirements need to be comprehensively considered and designed according to specific application scenarios.

 

The impact of spindle fixture performance requirements on semiconductor processing is very important. Improper spindle fixtures will lead to problems such as workpiece deformation, reduced machining accuracy, and unstable product quality. Therefore, when selecting and designing the spindle fixture, various factors such as processing requirements, working environment, and workpiece characteristics must be considered to ensure the performance and stability of the spindle fixture.

  「GPM Share」Design, selection and use of spindle fixtures in semiconductor equipment

Image credit: Getspares


IV. Selection and use of spindle fixture

 

According to different process requirements and equipment types of semiconductor processing, there are many types of commonly used spindle clamps. The following are several common spindle fixtures:

 

Mechanical Spindle Fixture

Mechanical spindle clamps are a traditional form of clamps, usually composed of clamping seats, threaded rods and sliders. Mechanical spindle fixtures have higher clamping strength and rigidity, but are more troublesome to adjust and operate.

Pneumatic Spindle Fixture

Pneumatic spindle clamps are clamps that use gas pressure to clamp and loosen workpieces. Pneumatic spindle clamps have the advantages of stable clamping force, simple operation, and wide application range, but have relatively high requirements for air sources, and pneumatic components are easily polluted and damaged.

Hydraulic Spindle Fixture Hydraulic spindle fixture is a fixture that uses hydraulic principles to clamp and loosen workpieces. The hydraulic spindle clamp has the characteristics of strong clamping force, convenient adjustment, simple operation and good stability, and is widely used in the field of high-precision machining. But hydraulic systems require specialized equipment to provide power, and hydraulic fluid is susceptible to contamination and leaks.

 

According to different application scenarios and processing requirements, you can choose a suitable spindle clamp type. When selecting a spindle fixture, it is also necessary to consider factors such as the shape, size and material of the processing object, and adjust and optimize it according to the process requirements. In addition, when using the spindle fixture, it is necessary to pay attention to maintenance and maintenance to avoid affecting the processing effect and product quality due to fixture failure.

 

V. Conclusion

 

As an important part of semiconductor equipment, the spindle fixture directly affects the processing effect and product quality. This article introduces the design and function, performance requirements, selection and use of the spindle fixture. In practical application, it is necessary to select a suitable spindle fixture according to the characteristics of the processing object and processing requirements, and pay attention to maintenance and maintenance to ensure the processing effect and product quality.

 

With the continuous development of semiconductor technology, spindle fixtures are also constantly innovating and improving. In the future, spindle fixtures will be more intelligent, automated and multifunctional to meet the needs of different fields and applications.

 

VI. References

 

Wang Moumou, Wang Moumou. Research and Application of Spindle Fixtures[J]. Machine Tool and Hydraulics, 2015(1):68-71.

Guo Moumou, Zhang Moumou. Design and Manufacturing of Semiconductor Equipment Spindle Fixtures[J]. Modern Manufacturing Engineering, 2018(6):56-59.

"Technical Specifications for Spindle Fixtures for Semiconductor Equipment", SEMI Standards, 2020.


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